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L-shaped grating couplers engineered with subwavelength metamaterial for sub-decibel coupling loss

Abstract : Practically attractive nanophotonic technologies, mostly realized on mature silicon-on-insulator (SOI) substrates, call upon availability of efficient input/output grating-coupled optical interfaces. In this work, we demonstrate, both theoretically and experimentally, ultra-directional L-shaped grating couplers for low-loss light coupling between standard optical fibres and SOI chips. Experimentally, we show grating couplers without and with subwavelength (SWG) transition, seamlessly fabricated with a 193-nm deep-ultraviolet lithography. Coupling loss of-2.7 dB is measured with a low return loss as low as-20 dB. In addition, we propose an apodized L-shaped grating coupler layouts with coupling loss below 1 dB. Apodized fiber-chip grating couplers are designed with a sub-decibel coupling performance, together with substantially relaxed requirements in terms of minimum feature dimensions.
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Contributor : Daniel Benedikovic <>
Submitted on : Friday, April 10, 2020 - 10:52:39 AM
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D. Benedikovic, C. Alonso-Ramos, S. Guerber, V Vakarin, G. Marcaud, et al.. L-shaped grating couplers engineered with subwavelength metamaterial for sub-decibel coupling loss. 2019 European Conference on Integrated Optics, Apr 2019, Ghent, Belgium. ⟨hal-02539548⟩

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