Improving Silicon Nitride Ring Resonator Performances On 300 mm Industrial Environment For Point of Care Applications

Michele Calvo (1, 2) , Guillaume Beaudin (1, 2) , Laurence Mercier-Coderre (1) , Pauline Girault (1, 2) , Pedro Rojo Romeo (1, 3) , Romain Stricher (1, 2) , Serge Ecoffey (1, 2) , Dominique Drouin (1, 2) , Frederic Boeuf (4) , Michael Canva (1, 2) , Stephane Monfray (4) , Régis Orobtchouk (3) , P. Charette (1, 2)

1 LN2 - Laboratoire Nanotechnologies et Nanosystèmes [Sherbrooke]
2 3IT - Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke]
3 INL - I-Lum - INL - Ingénierie et conversion de lumière (i-Lum)
4 ST-CROLLES - STMicroelectronics [Crolles]

Point-of-care tests (POCT) are important for detecting illnesses and monitoring patients without the need of a medical laboratory. To be useful, POCT must be sensitive, specific, integrated, and affordable. Since the early 2000s, integrated photonics have offered a possible solution for this problem. In particular, silicon micro-ring resonators represent a compact and sensitive choice known in the industry. This paper details the design, fabrication, and characterization of two methods for improving the performance of ring resonators by engineering their cross section. More precisely, improving devices made out of silicon nitride in an industrial environment to work in the infrared (around 1.31 µm).

Mots clés: Biosensors; lab-on-chip; biophotonics; plasmonics; higher order modes

Domaines: Micro et nanotechnologies/Microélectronique; Optique / photonique; Ingénierie biomédicale

Michele Calvo, Guillaume Beaudin, Laurence Mercier-Coderre, Pauline Girault, Pedro Rojo Romeo, et al.. Improving Silicon Nitride Ring Resonator Performances On 300 mm Industrial Environment For Point of Care Applications. Biophotonics in Point-of-Care, Apr 2020, Online Only, France. pp.5, ⟨10.1117/12.2555339⟩. ⟨hal-03517861⟩