Nanofab technological platform and realization of sensors on diamond substrate
Résumé
In this presentation, we will describe the technological platform NanoFab of the Néel Institute. Then we will see Polycrystalline Diamond Detectors for Online Hadron Therapy Beam Tagging Applications
The NanoFab platform is a local technology centred dedicated to produce objects for fundamental research.
The installations allow realization micro and nanoscale objects, often one use of a small number of technological steps and mainly by lithography techniques. Users are trained to carry out the manufacturing steps themselves with technical team supports.
The equipment is suitable for silicon substrates, but also a large number of exotic substrates are used. Whether by small size or very diverse natures (glass, diamonds, sapphire, membranes, etc.), reflecting the necessary flexibility of NanoFab.
In the second part, we will present the realization of thin layer of aluminium on diamond substrate. We will see the difficulties encountered in carrying out manufacturing steps and handling of transparent and small object such as 3x3mm or 10x10mm diamond substrates. We will then see the difficulty of cleaning the surface and the traps encountered. The challenge of making a resist on both sides of the sample and making an optical lithography with alignment and finally finishing with metallization.