A fabrication process for self-connected horizontal SiGe nanowires

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https://hal.archives-ouvertes.fr/hal-02351754
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Submitted on : Wednesday, November 6, 2019 - 3:13:18 PM
Last modification on : Tuesday, November 19, 2019 - 2:06:06 AM

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M. Merhej, S. Ecoffey, B. Sadani, B. Lee–sang, T. Baron, et al.. A fabrication process for self-connected horizontal SiGe nanowires. Microelectronic Engineering, Elsevier, 2019, pp.111150. ⟨10.1016/j.mee.2019.111150⟩. ⟨hal-02351754⟩

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