Robotic on-wafer probe station for microwave characterization in a scanning electron microscope

Kamel Haddadi (1) , A. El Fellahi (1) , J. Marzouk , S. Arscott (1, 2) , Christophe Boyaval , T. Lasri (1) , Gilles Dambrine (1)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 NAM6 - IEMN - Nano and Microsystems - IEMN

Domaines: Sciences de l'ingénieur [physics]

Kamel Haddadi, A. El Fellahi, J. Marzouk, S. Arscott, Christophe Boyaval, et al.. Robotic on-wafer probe station for microwave characterization in a scanning electron microscope. 2015 IEEE MTT-S International Microwave Symposium (IMS2015), May 2015, Phoenix, Arizona, United States. pp.1-3, ⟨10.1109/MWSYM.2015.7166970⟩. ⟨hal-02345575⟩