The critical role of N-vacancy on chemical composition fluctuations and degradation of InAlN layer

Ranim Mohamad (1) , Marie Pierre Chauvat (1) , Slawomir Kret (2) , Piero Gamarra (3) , Sylvain Delage (3) , Viwanou Hounkpati (1) , Cédric Lacam (3) , Jun Chen (1) , Pierre Ruterana (1)

1 CIMAP - UMR 6252 - Centre de recherche sur les Ions, les MAtériaux et la Photonique
2 IFPAN - Institute of Physics [Warsaw]
3 III-V Lab - Alcatel-Thales III-V Lab

Domaines: Matériaux; Cristallographie; Physique [physics]; Micro et nanotechnologies/Microélectronique; Optique / photonique

Ranim Mohamad, Marie Pierre Chauvat, Slawomir Kret, Piero Gamarra, Sylvain Delage, et al.. The critical role of N-vacancy on chemical composition fluctuations and degradation of InAlN layer. Journal of Applied Physics, 2019, 125 (21), pp.215707. ⟨10.1063/1.5088109⟩. ⟨hal-02335333⟩