3DdSiPM - Digital Photon Counting Microsystem Based on 3D Integration: Architechture and Measurements on 1st Prototype

Charlebois Sa (1, 2) , Bernard X , Bérubé Bl , Corbeil Therrien A , Dequivre T (1, 2) , Dubois F , Maurais L (1, 2) , Nolet F , Parent S (1, 2) , Rhéaume Vp , Martel S , Dautet H , Fontaine R , Pratte Jf (2)

1 LN2 - Laboratoire Nanotechnologies Nanosystèmes
2 3IT - Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke]

Domaines: Sciences de l'ingénieur [physics]

Charlebois Sa, Bernard X, Bérubé Bl, Corbeil Therrien A, Dequivre T, et al.. 3DdSiPM - Digital Photon Counting Microsystem Based on 3D Integration: Architechture and Measurements on 1st Prototype. Canadian semiconductor Science and Technology Conference (CSSTC), Aug 2017, Waterloo, Canada. ⟨hal-02332427⟩