Experimental and kinetic studies of C–H–O plasmas for polycrystalline and nano-smooth diamond deposition

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https://hal.archives-ouvertes.fr/hal-02326561
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Submitted on : Tuesday, October 22, 2019 - 3:19:22 PM
Last modification on : Wednesday, October 23, 2019 - 1:44:43 AM

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T. Gries, S. de Persis, L. Vandenbulcke, C. Met, J.L. Delfau, et al.. Experimental and kinetic studies of C–H–O plasmas for polycrystalline and nano-smooth diamond deposition. Diamond and Related Materials, Elsevier, 2009, 18 (5-8), pp.730-733. ⟨10.1016/j.diamond.2009.01.032⟩. ⟨hal-02326561⟩

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