Impact of contact and channel resistance on the frequency-dependent capacitance and conductance of pseudo-MOSFET

S. Sato , G. Ghibaudo (1) , L. Benea (1) , I. Ionica (1) , Y. Omura (2) , S. Cristoloveanu (1)

1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 Kansai University

Domaines: Micro et nanotechnologies/Microélectronique

S. Sato, G. Ghibaudo, L. Benea, I. Ionica, Y. Omura, et al.. Impact of contact and channel resistance on the frequency-dependent capacitance and conductance of pseudo-MOSFET. Solid-State Electronics, 2019, 159, pp.197-203. ⟨10.1016/j.sse.2019.03.059⟩. ⟨hal-02321909⟩