Etienne Herth, H Desré, Emmanuelle Algré, Christiane I. Legrand, Tuami Lasri. Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications.
Microelectronics Reliability, Elsevier, 2012, 52 (1), pp.141-146.
⟨10.1016/j.microrel.2011.09.004⟩.
⟨hal-02300326⟩