A Hybrid Prognostics Approach for MEMS: from Real Measurements to Remaining Useful Life Estimation

Haithem Skima (1) , Kamal Medjaher (2) , Christophe Varnier (1) , Eugen Dedu (1) , Julien Bourgeois (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 ENIT - Ecole Nationale d'Ingénieurs de Tarbes

This paper presents a hybrid prognostics approach for Micro Electro Mechanical Systems (MEMS). This approach relies on two phases: an offline phase for the MEMS and its degradation modeling, and an online phase where the obtained degradation model is used with the available data for prognostics. In the online phase, the particle filter algorithm is used to perform online parameters estimation of the degradation model and predict the Remaining Useful Life (RUL) of MEMS. The effectiveness of the proposed approach is validated on experimental data related to an electro-thermally actuated MEMS valve.

Mots clés: Prognostics and health management; MEMS; degradation modeling; health assessment; fault prognostics; remaining useful life

Domaines: Technologies Émergeantes [cs.ET]; Calcul parallèle, distribué et partagé [cs.DC]; Génie logiciel [cs.SE]; Informatique ubiquitaire; Cryptographie et sécurité [cs.CR]; Système multi-agents [cs.MA]; Modélisation et simulation; Automatique / Robotique; Algorithme et structure de données [cs.DS]

Haithem Skima, Kamal Medjaher, Christophe Varnier, Eugen Dedu, Julien Bourgeois. A Hybrid Prognostics Approach for MEMS: from Real Measurements to Remaining Useful Life Estimation. Microelectronics Reliability, 2016, 65, pp.79 - 88. ⟨hal-02300027⟩