Very Large Scale Integration Optomechanics: a cure for loneliness of NEMS resonators?

Maxime Hermouet (1) , Marc Sansa (1) , Martial Defoort (1) , Louise Banniard (1) , Sergio Dominauez-Medina , Shawn Fostner (1) , Ujwol Palanchoke (2) , Alexandre Fafin (1) , Marc Gély (1) , Louis Hutin (1) , Christophe Plantier (1) , Emmanuel Rolland (1) , Claude Tabone (1) , Giulia Usai (1) , Thomas Ernst (1) , Patrick Villard (3) , Gérard Billiot (1) , Paul Mattei (1) , Guillaume Nonglaton (1) , Caroline Fontelaye (1) , Charlie Barrois (1) , Olivier Castany (4) , Eduardo Gil Santos (5) , Pierre Allain (6, 5) , Emeline Vernhes (7) , Pascale Boulanger (7) , Ariel Brenac (8) , Christophe D. Masselon (9) , Ivan Favero (6, 5) , Thomas Alava (1) , Guillaume Jourdan (10) , Sebastien Hentz (11)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
3 DSYS - Département Systèmes
4 DOPT - Département d'Optronique
5 UPD7 - Université Paris Diderot - Paris 7
6 CNRS - Centre National de la Recherche Scientifique
7 I2BC - Institut de Biologie Intégrative de la Cellule
8 SPINTEC - SPINtronique et TEchnologie des Composants
9 EDyP - Etude de la dynamique des protéomes
10 DIHS - Département Intégration Hétérogène sur Silicium
11 D2NT - Département Nanotec

The first Very Large Scale Integration process with variable shape beam lithography for optomechanical devices is presented. State of the art performance was obtained with silicon microdisk resonators showing 1 million optical quality factors and 10 -17 m.Hz (-1/2) displacement resolution. Single-particle mass spectrometry could be performed with these optomechanical resonators in vacuum. The devices retained high performance when directly immersed in liquid media, allowing for biosensing experiments. These results open the door to large, dense arrays of optomechanical sensors.

Domaines: Sciences du Vivant [q-bio]

Maxime Hermouet, Marc Sansa, Martial Defoort, Louise Banniard, Sergio Dominauez-Medina, et al.. Very Large Scale Integration Optomechanics: a cure for loneliness of NEMS resonators?. 2018 IEEE International Electron Devices Meeting (IEDM), Dec 2018, San Francisco, United States. pp.12.4.1-12.4.3, ⟨10.1109/IEDM.2018.8614532⟩. ⟨hal-02284178⟩