Effects of the laser beam size on the Optical Beam Induced Current (OBIC) for the study of Wide Band Gap (WBG) Semi-Conductor Devices

Camille Sonneville (1, 2) , Dominique Planson (1, 2) , Luong Viêt Phung (1, 2) , Besar Asllani (1, 2) , Pascal Bevilacqua (1, 2)

1 EE - Ampère, Département Energie Electrique
2 INSA Lyon - Institut National des Sciences Appliquées de Lyon

UV Laser is used to generate electron-hole pairs into Wide Band-Gap (WBG) semiconductors (SiC, GaN or Ga2O3). In the space charge region, the electric field drives the collected carriers and a current, so-called Optical Beam induced Current (OBIC), can be measured. The induced current is then directly related to the electrical field in the device. The OBIC, is a non-destructive technique, which has been previously successfully used to characterize High Voltage (HV) SiC devices [1, 2, 3, 4]. In order to fully benefit of the advantages provided by WBG semiconductors materials and to avoid premature breakdown of the high voltage devices, it is mandatory to have efficient peripheral protections such as a MESA, a JTE and JTE rings…The OBIC characterization can help the technology computer-aided design (TCAD) and the device process to optimize the efficiency of the periphery protection by analyzing the electric field distribution in the structure and especially at the junction periphery. In this talk, we will present an in-house testbench called micro-OBIC which will allow us to characterize HV PiN diodes with a micro-meter spatial resolution.

Domaines: Energie électrique

Camille Sonneville, Dominique Planson, Luong Viêt Phung, Besar Asllani, Pascal Bevilacqua. Effects of the laser beam size on the Optical Beam Induced Current (OBIC) for the study of Wide Band Gap (WBG) Semi-Conductor Devices. Workshop on Compound Semiconductor Devices and Integrated Circuits 2019 (WOCSDICE 2019), Jun 2019, Cabourg, France. ⟨hal-02164000⟩