MEMS with an embedded fluidic microchannel for sensitive weighing of liquid samples

Céline Hadji , Léopold Virot (1) , Cyril Picard (2) , François Baleras (3) , Vincent Agache (3)

1 IEF - Institut d'électronique fondamentale
2 LIPhy - Laboratoire Interdisciplinaire de Physique [Saint Martin d’Hères]
3 DTBS - Département Microtechnologies pour la Biologie et la Santé

This paper reports hollow MEMS plate oscillators for the characterization of liquid samples, with a one-fold improvement in both Q-factor and Allan deviation compared to previous alike structures, and fluidic constriction larger than 1μm. These new characteristics make the devices amenable for the first time to liquid weighing with a 100 Hz.(g.L-1)-1 sensitivity and a few g.L-1 detection floor.

Domaines: Micro et nanotechnologies/Microélectronique

Céline Hadji, Léopold Virot, Cyril Picard, François Baleras, Vincent Agache. MEMS with an embedded fluidic microchannel for sensitive weighing of liquid samples. 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), 2017, Las Vegas, United States. ⟨10.1109/MEMSYS.2017.7863580⟩. ⟨hal-02155724⟩