Plasma etching for III-V/Ge multijunction solar cells singulation

M. Darnon (1, 2) , A. Jaouad (1, 2) , M. De Lafontaine (1, 2) , J. Belin (1, 2) , B. Bouzazi (1, 2) , M. Volatier (1, 2) , S. Fafard (1, 2) , R. Arès (1, 2) , V. Aimez (1, 2)

1 LN2 - Laboratoire Nanotechnologies Nanosystèmes
2 3IT - Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke]

Domaines: Sciences de l'ingénieur [physics]

M. Darnon, A. Jaouad, M. De Lafontaine, J. Belin, B. Bouzazi, et al.. Plasma etching for III-V/Ge multijunction solar cells singulation. 12th International Conference on Concentrator Photovoltaic Systems (CPV-12) (25–27 April 2016,, Apr 2016, Freiburg, Germany. ⟨hal-02097315⟩