Ring resonator designed for biosensing applications manufactured on 300 mm SOI in an industrial environment

Michele Calvo (1, 2) , Sylvain Guerber (3) , Guillaume Beaudin (2, 2, 1) , Michael Canva (1, 2) , Pedro Rojo Romeo (4) , Charles Baudot (5) , Frédéric Boeuf (5) , Paul Charette (1, 2) , Regis Orobtchouk (4) , Stephane Monfray (5)

1 LN2 - Laboratoire Nanotechnologies Nanosystèmes
2 3IT - Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke]
3 C2N - Centre de Nanosciences et de Nanotechnologies [Marcoussis]
4 INL - Photonique - INL - Nanophotonique
5 ST-CROLLES - STMicroelectronics [Crolles]

Domaines: Sciences du Vivant [q-bio]

Michele Calvo, Sylvain Guerber, Guillaume Beaudin, Michael Canva, Pedro Rojo Romeo, et al.. Ring resonator designed for biosensing applications manufactured on 300 mm SOI in an industrial environment. Japanese Journal of Applied Physics, 2019, 58 (SB), pp.SBBE02. ⟨10.7567/1347-4065/aafb50⟩. ⟨hal-02074726⟩