Scanning tunneling microscopy study of single-ion impacts on graphite surface

L. Porte (1) , M. Phaner (1) , C.H. de Villeneuve (1) , N. Moncoffre (2) , J. Tousset (2)

1 ECL - École Centrale de Lyon
2 IPNL - Institut de Physique Nucléaire de Lyon

Cleaved surfaces of highly oriented pyrolitic graphite were implanted with 50 keV-Ar+ and 150 keV-Xe3+ ions at a dose of S × 1011 cm−2. The surface damages due to single ion impacts were examined by scanning tunneling microscopy. Ion impacts are revealed by the formation of hillocks on the graphite surface. They are attributed to residual damages and defect-induced stresses due to the cascade collision of implanted ions

Domaines: Micro et nanotechnologies/Microélectronique; Physique [physics]

L. Porte, M. Phaner, C.H. de Villeneuve, N. Moncoffre, J. Tousset. Scanning tunneling microscopy study of single-ion impacts on graphite surface. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989, 44 (1), pp.116-119. ⟨10.1016/0168-583X(89)90696-4⟩. ⟨hal-02071451⟩