On the interest of piezoelectric NEMS for sensing and energy harvesting: from size to non-linear effects (invited)

Laurent Montès (1) , Ran Tao (1) , Ronan Hinchet (1) , Xin Xu (1) , Alexis Potie (1) , Gustavo Ardila (1) , Mireille Mouis (1) , Rudeesun Songmuang (2) , Thierry Baron (3)

1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 NEEL - NPSC - Nanophysique et Semiconducteurs
3 LTM - Laboratoire des technologies de la microélectronique

Domaines: Micro et nanotechnologies/Microélectronique

Laurent Montès, Ran Tao, Ronan Hinchet, Xin Xu, Alexis Potie, et al.. On the interest of piezoelectric NEMS for sensing and energy harvesting: from size to non-linear effects (invited). Piezoelectric Micro and Nano Structures and their Applications, C. Oshman & G. Poulin-Vitrant, Sep 2014, Blois, France. ⟨hal-02071373⟩