Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope

Pierre Janioud (1) , Alexandra Koumela (1) , Christophe Poulain (1) , Patrice P. Rey (1) , Audrey Berthelot (1) , Morfouli P. (2) , Guillaume Emmanuel Jourdan (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation

This paper proposes a stiffness correction method to improve the resilience to vibration of a dual-mass MEMS gyroscope with a particular focus near the resonance frequency of the anti-phase drive mode (fDa), i.e., its operational mode. Because of its balanced shape, this operating mode is ideally insensitive to vibrations. However, fabrication imperfections generates a residual sensitivity to parasitic vibrations that can disturb normal operation of the sensor. This work shows that the application of a DC voltage (Vtr) at the drive actuation electrode enables to decrease this sensitivity by a factor of at least 30 because of the stiffness tuning of the dual-mass structure. Experiments are performed to confirm this assumption and an efficient stiffness correction method is proposed to improve device operation.

Mots clés: stiffness correction; mechanical vibration; anti-phase mode; MEMS; gyroscope

Domaines: Micro et nanotechnologies/Microélectronique

Pierre Janioud, Alexandra Koumela, Christophe Poulain, Patrice P. Rey, Audrey Berthelot, et al.. Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope. Proceedings, 2017, 1 (4), pp.355. ⟨10.3390/proceedings1040355⟩. ⟨hal-02060585⟩