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On-Wafer Broadband Microwave Measurement of High impedance Devices-CPW Test Structures with Integrated Metallic Nano-resistances

K. Daffe 1 F. Mubarak V. Mascolo 1 H. Votsi N. Ridler Gilles Dambrine 1, 2 Isabelle Roch-Jeune 1 Kamel Haddadi 1, 3
2 ANODE - IEMN - Advanced NanOmeter DEvices - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
3 CSAM - IEMN - Circuits Systèmes Applications des Micro-ondes - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520, Institut TELECOM/TELECOM Lille1
Abstract : On-wafer microwave characterization and uncertainty evaluation of two-port coplanar waveguide (CPW) high impedance nanodevices devices are proposed. The test vehicles are built up with resistive metallic nano-films integrated in tapered CPW structures. Microwave conductance in the range 100-500µS associated to parallel capacitances in the order of hundreds aF are exemplary shown up to 20GHz. In addition, the uncertainty related to the post-calibration residual errors terms together with a sensitivity study to the technological process variability using FEM-based EM modelling are considered.
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Submitted on : Monday, March 4, 2019 - 6:47:45 PM
Last modification on : Wednesday, March 23, 2022 - 3:51:32 PM
Long-term archiving on: : Wednesday, June 5, 2019 - 4:20:54 PM

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K. Daffe, F. Mubarak, V. Mascolo, H. Votsi, N. Ridler, et al.. On-Wafer Broadband Microwave Measurement of High impedance Devices-CPW Test Structures with Integrated Metallic Nano-resistances. 2018 48th European Microwave Conference (EuMC), Sep 2018, Madrid, Spain. pp.25-28, ⟨10.23919/EuMC.2018.8541607⟩. ⟨hal-02056825⟩

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