On-Wafer Broadband Microwave Measurement of High impedance Devices-CPW Test Structures with Integrated Metallic Nano-resistances

K. Daffe (1) , F. Mubarak , V. Mascolo (1) , H. Votsi , N. Ridler , Gilles Dambrine (1, 2) , Isabelle Roch-Jeune (1) , Kamel Haddadi (1, 3)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 ANODE - IEMN - Advanced NanOmeter DEvices - IEMN
3 CSAM - IEMN - Circuits Systèmes Applications des Micro-ondes - IEMN

On-wafer microwave characterization and uncertainty evaluation of two-port coplanar waveguide (CPW) high impedance nanodevices devices are proposed. The test vehicles are built up with resistive metallic nano-films integrated in tapered CPW structures. Microwave conductance in the range 100-500µS associated to parallel capacitances in the order of hundreds aF are exemplary shown up to 20GHz. In addition, the uncertainty related to the post-calibration residual errors terms together with a sensitivity study to the technological process variability using FEM-based EM modelling are considered.

Mots clés: On-wafer calibration; vector network analyzer (VNA); two-port measurement; coplanar waveguide (CPW); uncertainty

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique

K. Daffe, F. Mubarak, V. Mascolo, H. Votsi, N. Ridler, et al.. On-Wafer Broadband Microwave Measurement of High impedance Devices-CPW Test Structures with Integrated Metallic Nano-resistances. 2018 48th European Microwave Conference (EuMC), Sep 2018, Madrid, Spain. pp.25-28, ⟨10.23919/EuMC.2018.8541607⟩. ⟨hal-02056825⟩