Thermal conductivity in Si 2D phononic membranes studied by Raman Thermometry,

Stanislav Didenko (1) , Antonin Massoud (2) , Tierno M'Bah (1) , J.F. Robillard (1) , Pierre-Olivier Chapuis (2) , Jean-Marie Bluet (3) , Emmanuel Dubois (1) , Thomas Skotnicki (4)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 CETHIL - Centre d'Energétique et de Thermique de Lyon
3 INL - S&N - INL - Spectroscopies et Nanomatériaux
4 ST-CROLLES - STMicroelectronics [Crolles]

Domaines: Thermique [physics.class-ph]

Stanislav Didenko, Antonin Massoud, Tierno M'Bah, J.F. Robillard, Pierre-Olivier Chapuis, et al.. Thermal conductivity in Si 2D phononic membranes studied by Raman Thermometry,. GDRe Workshop on Thermal Nanosciences and NanoEngineering, Nov 2017, Lille, France. ⟨hal-02030916⟩