ψ-MOSFET Configuration for DNA Detection

Licinius Benea (1) , Maryline Bawedin (1) , Sorin Cristoloveanu (1) , Irina Ionica (1) , Melania Banu (2) , Monica Simion (2) , Mihaela Kusko (2) , Cécile Delacour (3)

1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 IMT-Bucharest - National Institute for Research and Development in Microtechnologies
3 NEEL - TPS - Thermodynamique et biophysique des petits systèmes

This work proposes a novel method for DNA detection by using the ψ-MOSFET configuration. Systematic measurements of the drain current vs. gate voltage revealed an important shift of the characteristics corresponding to the charge of the biochemical species attached to the top surface of the device. The results were validated by fluorescent scanning. The advantages of this method are its simplicity and sensitivity.

Mots clés: ψ-MOSFET; surface functionalization; DNA detection; field-effect; SOI

Domaines: Micro et nanotechnologies/Microélectronique; Biotechnologies

Licinius Benea, Maryline Bawedin, Sorin Cristoloveanu, Irina Ionica, Melania Banu, et al.. ψ-MOSFET Configuration for DNA Detection. 2018 International Semiconductor Conference (CAS), Oct 2018, Sinaia, Romania. pp.143-146, ⟨10.1109/SMICND.2018.8539753⟩. ⟨hal-02007655⟩