Comparison of characterization techniques for measurements of doping concentrations in compensated n-type silicon

Aurélie Fauveau (1) , Benoit Martel (1) , Sebastien Dubois (1) , Jordi Veirman (1) , Anne Kaminski (2) , Frédérique Ducroquet (2)

1 INES - Institut National de L'Energie Solaire
2 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation

Domaines: Micro et nanotechnologies/Microélectronique

Aurélie Fauveau, Benoit Martel, Sebastien Dubois, Jordi Veirman, Anne Kaminski, et al.. Comparison of characterization techniques for measurements of doping concentrations in compensated n-type silicon. 6th International Conference on Crystalline Silicon Photovoltaics - nPV workshop, Mar 2016, Chambéry, France. ⟨hal-02001055⟩