Control of the Alumina Microstructure to Reduce Gate Leaks in Diamond MOSFETs

Marina Gutiérrez (1) , Fernando Lloret (1) , Toàn Pham (2) , Jesús Cañas (1) , Daniel Reyes (1) , David Eon (2) , Julien Pernot (2) , Daniel Araujo (1)

1 Dpto Ciencia de los Materiales
2 NEEL - SC2G - Semi-conducteurs à large bande interdite

Domaines: Matière Condensée [cond-mat]; Science des matériaux [cond-mat.mtrl-sci]

Marina Gutiérrez, Fernando Lloret, Toàn Pham, Jesús Cañas, Daniel Reyes, et al.. Control of the Alumina Microstructure to Reduce Gate Leaks in Diamond MOSFETs. Nanomaterials, 2018, 8 (8), pp.584. ⟨10.3390/nano8080584⟩. ⟨hal-02000822⟩