First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles

T. Toloshniak , Y. Guhel (1) , A. Besq , B. Boudart (1)

1 Equipe Electronique - Laboratoire GREYC - UMR6072

Domaines: Sciences de l'ingénieur [physics]; Matériaux; Electronique; Matériaux

T. Toloshniak, Y. Guhel, A. Besq, B. Boudart. First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles. Microelectronic Engineering, 2019, 207, pp.7-14. ⟨10.1016/j.mee.2018.11.013⟩. ⟨hal-01990131⟩