Skip to Main content Skip to Navigation
Conference papers

Glass integrated nanochannel waveguide for concentration measurements

Abstract : We present a new integrated optical sensor for absorption spectroscopy in a hostile environment, based on a nanochannel waveguide structure in glass. The nanochannel waveguide is made by bonding two ion-exchanged borosilicate glass wafers, one of them being etched by reactive ion etching to create a 100 nm deep fluidic channel. Typical fluid/light interaction factors of 2.3 % can be achieved inside a 7.4 pL volume of fluid, over a 550 nm bandwidth, surmounting evanescent wave sensors in terms of confinement efficiency and allowing spectrometric measurements. Absorption measurements have been performed on hexahydrate neodymium nitrate in nitric acid solutions of various concentrations leading to a minimum detectable absorption coefficient of 0.57 cm-1, which can be further decreased by implementing low bending-loss spiral-like nanochannel waveguides.
Complete list of metadatas
Contributor : Davide Bucci <>
Submitted on : Monday, January 7, 2019 - 4:27:55 PM
Last modification on : Saturday, November 21, 2020 - 3:33:06 AM




E. Jardinier, Davide Bucci, L. Couston, F. Canto, A. Magnaldo, et al.. Glass integrated nanochannel waveguide for concentration measurements. Integrated Optics: Devices, Materials, and Technologies XVII, Mar 2013, San Francisco, United States. ⟨10.1117/12.2002431⟩. ⟨hal-01972378⟩



Record views