Measuring topographies from conventional SEM acquisitions

Abstract : The present study extends the stereoscopic imaging principle for estimating the surface topography to two orientations, namely, normal to the electron beam axis and inclined at 70° as suited for EBSD analyses. In spite of the large angle difference, it is shown that the topography can be accurately determined using regularized global Digital Image Correlation. The surface topography is compared to another estimate issued from a 3D FIB-SEM procedure where the sample surface is first covered by a Pt layer, and its initial topography is progressively revealed from successive FIB-milling. These two methods are successfully compared on a 6% strained steel specimen in an in situ mechanical test. This analysis is supplemented by a third approach estimating the change of topography from crystal rotations as measured from successive EBSD images. This last technique ignores plastic deformation, and thus only holds in an elastic regime. For the studied example, despite the large plastic flow, it is shown that crystal rotation already accounts for a significant part of the deformation-induced topography.
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Qiwei Shi, Stéphane Roux, Felix Latourte, François Hild, Dominique Loisnard, et al.. Measuring topographies from conventional SEM acquisitions. Ultramicroscopy, Elsevier, 2018, 191, pp.18-33. ⟨10.1016/j.ultramic.2018.04.006⟩. ⟨hal-01970210⟩

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