Strain relaxation and critical thickness for epitaxial LaAlO3 thin films grown on SrTiO3(001) substrates by molecular beam epitaxy

C. Merckling (1, 2) , M. El-Kazzi (1) , G. Delhaye (1) , V. Favre-Nicolin (3) , Y. Robach (1) , M. Gendry (1) , G. Grenet (1) , Guillaume Saint-Girons (1) , G. Hollinger (1)

1 INL - H&N - INL - Hétéroepitaxie et Nanostructures
2 ST-CROLLES - STMicroelectronics [Crolles]
3 SP2M - UMR 9002 - Service de Physique des Matériaux et Microstructures

Domaines: Science des matériaux [cond-mat.mtrl-sci]

C. Merckling, M. El-Kazzi, G. Delhaye, V. Favre-Nicolin, Y. Robach, et al.. Strain relaxation and critical thickness for epitaxial LaAlO3 thin films grown on SrTiO3(001) substrates by molecular beam epitaxy. Journal of Crystal Growth, 2007, 306 (1), pp.47-51. ⟨hal-01939914⟩