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Communication Dans Un Congrès Année : 2017

Microelectronics thin films and boundaries characterized by scanning thermal microscopy

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hal-01932659 , version 1 (23-11-2018)

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  • HAL Id : hal-01932659 , version 1

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Axel Pic, Sebastien Gallois-Garreignot, Vincent Fiori, Pierre-Olivier Chapuis. Microelectronics thin films and boundaries characterized by scanning thermal microscopy. MRS Spring meeting, Symposium NM2 on “Nanoscale Heat Transfer – From fundamentals to devices”, Apr 2017, Phoenix, United States. ⟨hal-01932659⟩
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