Reduced Order Modelling for efficient numerical optimisation of a hot-wall Chemical Vapour Deposition reactor

Domenico Borzacchiello (1) , Jose Aguado (2) , Francisco Chinesta (3)

1 ICI - Institut de Calcul Intensif
2 ECN - École Centrale de Nantes
3 GeM - Institut de Recherche en Génie Civil et Mécanique

This paper presents a reduced order computational strategy for multi-physics simulation involving fluid flow, electrodynamics and heat transfer in a hot-wall Chemical Vapour Deposition (CVD) reactor. The main goal is to produce a multi-parametric solution for fast exploration of the design space in order to perform numerical prototyping and process optimisation. Different reduced order techniques are applied. In particular the Proper Generalized Decomposition (PGD) is used to solve the parametrised heat transfer equation in a five-dimensional space. The solution is provided in a compact separated-variable format allowing a fast evaluation of the process-specific quantities of interest that are involved in the optimisation algorithm.

Mots clés: Reduced Order Modelling; Multi-physics; Process Optimisation; Numerical Prototyping; Chemical Vapour Deposition; Proper Generalized Decomposition; High Dimensional Parametric PDE

Domaines: Génie des procédés; Thermique [physics.class-ph]; Mécanique des fluides [physics.class-ph]; Electromagnétisme

Domenico Borzacchiello, Jose Aguado, Francisco Chinesta. Reduced Order Modelling for efficient numerical optimisation of a hot-wall Chemical Vapour Deposition reactor. International Journal of Numerical Methods for Heat and Fluid Flow, 2016. ⟨hal-01925857⟩