Development of technological building blocks for the monolithic integration of ammonia-MBE-grown GaN-HEMTs with silicon CMOS

Rémi Comyn (1, 2, 3) , Yvon Cordier (1) , Sébastien Chenot (1) , Abdelatif Jaouad (2) , Hassan Maher (4, 2, 3) , Vincent Aimez (5, 2, 3)

1 CRHEA - Centre de recherche sur l'hétéroepitaxie et ses applications
2 LN2 - Laboratoire Nanotechnologies Nanosystèmes
3 3IT - Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke]
4 OMMIC
5 Université de Sheerbrooke Faculty of Engineering

Domaines: Sciences de l'ingénieur [physics]

Rémi Comyn, Yvon Cordier, Sébastien Chenot, Abdelatif Jaouad, Hassan Maher, et al.. Development of technological building blocks for the monolithic integration of ammonia-MBE-grown GaN-HEMTs with silicon CMOS. physica status solidi (a), 2016, 213 (4), pp.917 - 924. ⟨10.1002/pssa.201532732⟩. ⟨hal-01918142⟩