Focused gas beam injection for efficient ammonia-molecular beam epitaxial growth of III-nitride semiconductors

Abderrahim Rahim Boucherif (1, 2) , Maxime Rondeau (1, 2) , Hubert Pelletier (1, 2) , Philippe-Olivier Provost (1, 2) , Abderraouf A Boucherif (3, 1, 2) , Christian Dubuc , Hassan Maher (4, 1, 2) , Richard A Arès (3, 1, 2)

1 LN2 - Laboratoire Nanotechnologies Nanosystèmes
2 3IT - Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke]
3 UdeS - Université de Sherbrooke
4 OMMIC

Domaines: Sciences de l'ingénieur [physics]

Abderrahim Rahim Boucherif, Maxime Rondeau, Hubert Pelletier, Philippe-Olivier Provost, Abderraouf A Boucherif, et al.. Focused gas beam injection for efficient ammonia-molecular beam epitaxial growth of III-nitride semiconductors. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2016, 34 (2), ⟨10.1116/1.4943921⟩. ⟨hal-01918139⟩