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MEMS Four-Terminal Variable Capacitor for low power Capacitive Adiabatic Logic with High Logic State Differentiation

Abstract : This paper presents a novel four-terminal variable capacitor (FTVC) dedicated to the recent concept of low power capacitive adiabatic logic (CAL). This FTVC is based on silicon nano/micro technologies and is intended to achieve adiabatic logic functions with a better efficiency that by using field effect transistor (FET). The proposed FTVC consists of two capacitors mechanically coupled and electrically isolated, where a comb-drive input capacitor controls a gap-closing capacitor at the output. To fully implement the adiabatic combinational logic, we propose two types of variable capacitors: a positive variable capacitor (PVC) where the output capacitance value increases with the input voltage, and a negative variable capacitance (NVC) where the output capacitance value decreases when the input voltage increases. A compact and accurate electromechanical model has been developed. The electromechanical simulations demonstrate the ability of the proposed FTVC devices for CAL, with improved features such as high logic states differentiation larger than 50% of the full-scale input signal and cascability of both buffers and inverters. Based on the presented analysis, 89% of the total injected energy in the device can be recovered, the remaining energy being dissipated through mechanical damping. During one cycle of operation, a buffer gate of 10x2.5 µm 2 dissipates only 0.9 fJ.
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Contributor : Gael Pillonnet <>
Submitted on : Wednesday, October 31, 2018 - 3:46:24 PM
Last modification on : Monday, April 19, 2021 - 8:51:35 AM
Long-term archiving on: : Friday, February 1, 2019 - 4:32:32 PM


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Hatem Samaali, Y. Perrin, A. Galisultanov, H. Fanet, Gaël Pillonnet, et al.. MEMS Four-Terminal Variable Capacitor for low power Capacitive Adiabatic Logic with High Logic State Differentiation. Nano Energy, Elsevier, 2018, ⟨10.1016/j.nanoen.2018.10.059⟩. ⟨hal-01910144⟩



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