On the increase of the controllability matrix rank in non-threaded run-to-run control

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https://hal.archives-ouvertes.fr/hal-01893102
Contributor : Guillaume Graton <>
Submitted on : Thursday, October 11, 2018 - 10:02:36 AM
Last modification on : Saturday, October 13, 2018 - 1:22:18 AM

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Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. On the increase of the controllability matrix rank in non-threaded run-to-run control. 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, France. ⟨10.1109/ASMC.2018.8373153⟩. ⟨hal-01893102⟩

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