Virtual metrology on semiconductor manufacturing based on Just-in-time learning**This work is a part of the European project ”INTEGRATE”, and carried by STMicroelectronics Fab

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https://hal.archives-ouvertes.fr/hal-01893090
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Submitted on : Thursday, October 11, 2018 - 9:56:12 AM
Last modification on : Tuesday, May 21, 2019 - 2:22:03 PM

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M. Jebri, M. El Adel, G. Graton, M. Ouladsine, J. Pinaton. Virtual metrology on semiconductor manufacturing based on Just-in-time learning**This work is a part of the European project ”INTEGRATE”, and carried by STMicroelectronics Fab. IFAC-PapersOnLine, Elsevier, 2016, 49 (12), pp.89 - 94. ⟨10.1016/j.ifacol.2016.07.555⟩. ⟨hal-01893090⟩

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