Micro heat pipe design and fabrication on LTCC

Malika Tlili 1 Maïna Sinou 1, 2 Camilla Kärnfelt 3, 1 Daniel Bourreau 4, 1 Alain Peden 3, 1
3 Lab-STICC_IMTA_MOM_DIM
Lab-STICC - Laboratoire des sciences et techniques de l'information, de la communication et de la connaissance
4 Lab-STICC_IMTA_MOM_PIM
Lab-STICC - Laboratoire des sciences et techniques de l'information, de la communication et de la connaissance
Abstract : This paper presents work on micro heat pipe (MHP) fabrication in Low Temperature Cofired Ceramics (LTCC) modules for cooling purpose. The MHPs are fabricated in a 10 layer structure using ESL41020 tape. Different fabrication settings have been tested to minimize swelling and groove deformation. The best result is obtained by using fugitive tape, extended firing profile, and hot lamination at 50°C for 5 minutes with 70 bar pressure.
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Conference papers
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https://hal.archives-ouvertes.fr/hal-01881235
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Submitted on : Tuesday, September 25, 2018 - 3:39:32 PM
Last modification on : Wednesday, March 6, 2019 - 3:10:39 PM

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  • HAL Id : hal-01881235, version 1

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Malika Tlili, Maïna Sinou, Camilla Kärnfelt, Daniel Bourreau, Alain Peden. Micro heat pipe design and fabrication on LTCC. ESTC2018: Electronics System-Integration Technology Conference, Sep 2018, Dresde, Germany. ⟨hal-01881235⟩

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