Electron tomography combining ESEM and STEM: A new 3D imaging technique

P. Jornsanoh (1, 2) , G. Thollet (1, 2) , J. Ferreira , Karine Masenelli-Varlot (1, 2) , C. Gauthier (1) , A. Bogner (1, 2)

1 MATEIS - Matériaux, ingénierie et science [Villeurbanne]
2 CLYM - Consortium Lyon Saint-Etienne de Microscopie

This paper presents the development and the application of a new electron tomography technique based on STEM (Scanning Transmission Electron Microscopy) configuration in ESEM (Environmental Scanning Electron Microscopy). This combination provides a new approach for the characterization of the 3D structure of materials, as it optimizes a compromise between the resolution level of a few tens of nm and the large tomogram size due to the high thickness of transparency. The method is well adapted for non-conductive samples, and exhibits good contrast even for materials with low atomic number. The paper describes the development of a dedicated stage for this new tomography technique. Taking advantage of the size of the ESEM chamber, the range of tilt angles is not limited by the space around the sample. The performance of this device is illustrated through the three-dimensional characterization of samples issued from materials science and chosen to illustrate the results in resolution, contrast and thickness. © 2011 Elsevier B.V.

Mots clés: scanning transmission electron microscopy; structure analysis; thickness; three dimensional imaging; X ray analysis; ESEM; Electron tomography; Large tomogram; Low-atomic number materials; Non-conductive samples; STEM; Three-dimensional characterization; Atoms; Characterization; Conductive materials; Electric impedance tomography; Electrons; intermethod comparison; instrument validation; image reconstruction; process optimization; process development; Imaging techniques; Scanning electron microscopy; Transmission electron microscopy; Three dimensional; article; atomic particle; controlled study; electron tomography; environmental scanning electron microscopy; equipment design; image enhancement; image quality

Domaines: Matériaux

P. Jornsanoh, G. Thollet, J. Ferreira, Karine Masenelli-Varlot, C. Gauthier, et al.. Electron tomography combining ESEM and STEM: A new 3D imaging technique. Ultramicroscopy, 2011, 111 (8), pp.1247-1254. ⟨10.1016/j.ultramic.2011.01.041⟩. ⟨hal-01813696⟩