Comparison of Refractive Indices measured by m-lines and Ellipsometry: application to Polymer Blend and Ceramic Thin Films for Gas Sensors

Thomas Wood (1) , Judikaël Le Rouzo (1) , François Flory (2) , Paul Coudray (3) , Valmor Roberto Mastelaro , Pedro Pelissari , Sergio Zilio , Mt Postek , Va Coleman , Ng Orji

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 OPTO-PV
3 KLOE SA - KLOE

Domaines: Micro et nanotechnologies/Microélectronique; Optique / photonique

Thomas Wood, Judikaël Le Rouzo, François Flory, Paul Coudray, Valmor Roberto Mastelaro, et al.. Comparison of Refractive Indices measured by m-lines and Ellipsometry: application to Polymer Blend and Ceramic Thin Films for Gas Sensors. Instrumentation, Metrology, and Standards For Nanomanufacturing, Optics, and Semiconductors Vi, 2012, 8466, ⟨10.1117/12.928693⟩. ⟨hal-01810805⟩