Skip to Main content Skip to Navigation
Journal articles

Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer

Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-01771659
Contributor : Emmanuelle Algre <>
Submitted on : Thursday, April 19, 2018 - 4:35:34 PM
Last modification on : Tuesday, June 2, 2020 - 7:36:04 AM

Identifiers

Citation

Etienne Herth, Laurie Valbin, Franck Lardet-Vieudrin, Emmanuelle Algre. Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer. Microsystem Technologies, Springer Verlag, 2017, 23 (9), pp.3873 - 3880. ⟨10.1007/s00542-015-2727-9⟩. ⟨hal-01771659⟩

Share

Metrics

Record views

353