Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer

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https://hal.archives-ouvertes.fr/hal-01771659
Contributor : Emmanuelle Algre <>
Submitted on : Thursday, April 19, 2018 - 4:35:34 PM
Last modification on : Thursday, February 7, 2019 - 5:04:19 PM

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Etienne Herth, Laurie Valbin, Franck Lardet-Vieudrin, Emmanuelle Algre. Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer. Microsystem Technologies, Springer Verlag, 2017, 23 (9), pp.3873 - 3880. ⟨10.1007/s00542-015-2727-9⟩. ⟨hal-01771659⟩

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