Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer

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https://hal.archives-ouvertes.fr/hal-01771653
Contributor : Emmanuelle Algre <>
Submitted on : Thursday, April 19, 2018 - 4:32:06 PM
Last modification on : Thursday, February 7, 2019 - 2:46:22 PM

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Etienne Herth, Emmanuelle Algre, Jean-Yves Rauch, Jean-Claude Gerbedoen, Nicolas Defrance, et al.. Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer. physica status solidi (a), Wiley, 2016, 213 (1), pp.114 - 121. ⟨10.1002/pssa.201532302⟩. ⟨hal-01771653⟩

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