New comb geometry of capacitive vibration energy harvesters miniaturizing the air damping effect

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https://hal.archives-ouvertes.fr/hal-01769056
Contributor : Philippe Basset <>
Submitted on : Tuesday, April 17, 2018 - 4:35:45 PM
Last modification on : Tuesday, January 15, 2019 - 2:54:11 PM

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Y. Lu, F. Marty, D. Galayko, Philippe Basset. New comb geometry of capacitive vibration energy harvesters miniaturizing the air damping effect. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2017, Las Vegas, France. ⟨10.1109/MEMSYS.2017.7863543⟩. ⟨hal-01769056⟩

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