Characterization of a thin piezoelectric material before integration into a cantilever-based mechanical energy harvester

Thien Hoang (1, 2) , G. Férin (1) , B. Rosinski (1) , C. Bantignies (1) , H. Le Khanh (1) , An Nguyen-Dinh (1) , G. Poulin-Vittrant (2) , Franck Levassort (2) , Maxime Bavencoffe (2)

1 Vermon S.A.
2 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

Domaines: Micro et nanotechnologies/Microélectronique

Thien Hoang, G. Férin, B. Rosinski, C. Bantignies, H. Le Khanh, et al.. Characterization of a thin piezoelectric material before integration into a cantilever-based mechanical energy harvester. 2016 IEEE International Ultrasonics Symposium (IUS), Sep 2016, Tours, France. ⟨10.1109/ULTSYM.2016.7728652⟩. ⟨hal-01741000⟩