Determination of critical process steps for enhanced yield improvement

Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-01721693
Contributor : Sebastien Fregonese <>
Submitted on : Friday, March 2, 2018 - 1:58:52 PM
Last modification on : Saturday, March 3, 2018 - 1:05:17 AM

Identifiers

Citation

J. Duluc, Thomas Zimmer, N. Lewis, Jean Dom. Determination of critical process steps for enhanced yield improvement. Microelectronic Manufacturing 1996, Sep 1996, Austin, France. ⟨10.1117/12.250852⟩. ⟨hal-01721693⟩

Share

Metrics

Record views

141