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Study of the composition of hydrogenated silicon nitride SiNx:H for efficient surface and bulk passivation of silicon

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https://hal.archives-ouvertes.fr/hal-01706842
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Submitted on : Monday, February 12, 2018 - 12:22:31 PM
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J.-F. Lelièvre, E. Fourmond, A. Kaminski, Olivier Palais, D. Ballutaud, et al.. Study of the composition of hydrogenated silicon nitride SiNx:H for efficient surface and bulk passivation of silicon. Solar Energy Materials and Solar Cells, Elsevier, 2009, 93 (8), pp.1281 - 1289. ⟨10.1016/j.solmat.2009.01.023⟩. ⟨hal-01706842⟩

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