Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C) - Archive ouverte HAL Access content directly
Conference Papers Year : 2002

Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C)

Olivier Robert
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  • PersonId : 888334
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Laboratoire de Mathématiques Unifiées de Saint-Etienne
Gilles Amendola
Electronique, Systèmes de communication et Microsystèmes
Hua Chen
Beijing Genomics Institute [Shenzhen]
Olivier Gigan
  • Function : Author

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Electronics

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https://hal.science/hal-01694309

Submitted on : Saturday, January 27, 2018-9:22:18 AM

Last modification on : Monday, January 29, 2024-7:10:02 PM

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hal-01694309 , version 1 (27-01-2018)

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Olivier Robert, Gilles Amendola, Hua Chen, Olivier Gigan. Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C). SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, Dec 2002, Melbourne, Australia. ⟨10.1117/12.469399⟩. ⟨hal-01694309⟩

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