Out-of-Equilibrium Body Potential Measurements in Pseudo-MOSFET for Sensing Applications

Licinius Benea (1) , Maryline Bawedin (1) , Cécile Delacour (2) , Irina Ionica (1)

1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 NEEL - TPS - Thermodynamique et biophysique des petits systèmes

The aim of this paper is to present the out-of-equilibrium body potential behaviour in the Ψ-MOSFET configuration. Consistent measurements in this experimental setup succeeded in providing a substantial understanding of its characteristics in the depletion region. The final objective of this work is to envision this new measurement technique for biochemical sensor applications. Among its advantages, the most important are its simplicity, the good sensitivity, the measurement of a potential instead of a current and the low bias needed for detection compared to the conventional drain current measurements.

Mots clés: Ψ-MOSFET; field-effect; biochemical sensor; body potential; SOI

Domaines: Micro et nanotechnologies/Microélectronique; Biotechnologies; Matière Condensée [cond-mat]; Autre [cond-mat.other]

Licinius Benea, Maryline Bawedin, Cécile Delacour, Irina Ionica. Out-of-Equilibrium Body Potential Measurements in Pseudo-MOSFET for Sensing Applications. Solid-State Electronics, 2018, 143, pp.69-76. ⟨10.1016/j.sse.2017.11.010⟩. ⟨hal-01685404⟩