Optical Feedback Interferometry for Raster Scan Profilometry

Bastien Grimaldi 1 Antonio Luna Arriaga 1 Francis Bony 1 Clément Tronche 2 Julien Perchoux 1
1 LAAS-OSE - Équipe Optoélectronique pour les Systèmes Embarqués
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-I2C - Service Instrumentation Conception Caractérisation
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : This paper evaluates optical feedback interferome-try for raster scan profilometry applications. It is shown both experimentally and theoretically that the spot size on target plays a major role as the phase distribution of the scattering contributions impacts drastically the sensor signal.
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Bastien Grimaldi, Antonio Luna Arriaga, Francis Bony, Clément Tronche, Julien Perchoux. Optical Feedback Interferometry for Raster Scan Profilometry. IEEE Sensors 2017, Oct 2017, Glasgow, United Kingdom. 3p. ⟨hal-01685167⟩

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