HVPE of aluminum nitride, film evaluation and multiscale modeling of the growth process

M. Pons (1) , J. Su (2) , M. Chubarov (1) , R. Boichot (1) , Florian Mercier (1) , Elisabeth Blanquet (1) , G. Giusti (3) , D. Pique (4)

1 SIMaP - Science et Ingénierie des Matériaux et Procédés
2 Xjtu - Xi'an Jiaotong University
3 SIL’TRONIX-ST, Archamps, France
4 SIL’TRONIX-ST, Archamps, France

Domaines: Matériaux

M. Pons, J. Su, M. Chubarov, R. Boichot, Florian Mercier, et al.. HVPE of aluminum nitride, film evaluation and multiscale modeling of the growth process. Journal of Crystal Growth, 2017, 468, pp.235 - 240. ⟨10.1016/j.jcrysgro.2017.01.002⟩. ⟨hal-01656377⟩