Impact of output metric on the resolution of mode-localized MEMS resonant sensors

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https://hal.archives-ouvertes.fr/hal-01657114
Contributor : Pietro Maris Ferreira <>
Submitted on : Wednesday, December 6, 2017 - 1:37:50 PM
Last modification on : Thursday, March 21, 2019 - 2:17:55 PM

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  • HAL Id : hal-01657114, version 1

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Jérôme Juillard, Pierre Prache, Pietro Maris Ferreira, Nuria Barniol. Impact of output metric on the resolution of mode-localized MEMS resonant sensors. Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2017 Joint Conference of the European, Jul 2017, Besancon, France. ⟨hal-01657114⟩

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