Anomalous C-V response correlated to relaxation processes in TiO 2 thin film based-metal-insulator-metal capacitor: Effect of titanium and oxygen defects

A. Kahouli (1) , C. Marichy (2) , A. Sylvestre (1) , N. Pinna

1 G2ELab - Laboratoire de Génie Electrique de Grenoble
2 LMI - Laboratoire des Multimatériaux et Interfaces

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Domaines: Matière Condensée [cond-mat]

A. Kahouli, C. Marichy, A. Sylvestre, N. Pinna. Anomalous C-V response correlated to relaxation processes in TiO 2 thin film based-metal-insulator-metal capacitor: Effect of titanium and oxygen defects. Journal of Applied Physics, 2015, 117 (15), pp.16937 - 16945. ⟨10.1063/1.4917531⟩. ⟨hal-01612018⟩